多自由度运动误差在线测量系统设计Design of multi-DOF motion error online measurement system
杨博
摘要(Abstract)：
针对传统多自由度运动误差测量系统一直存在易受工作环境影响,误差测量稳定性差的问题,提出并设计基于激光干涉仪的多自由度运动误差在线测量系统。通过分析激光干涉仪误差测量原理,在传统运动误差测量系统中引入激光干涉仪,利用激光干涉现象对多自由度运动物体精确测定,建立多自由度运动误差在线测量数学模型,实现多自由度运动误差的测量。实验结果表明,相比传统测量系统,改进设计的多自由度运动误差在线测量系统,具有良好的抗干扰能力及较高的测量准确性。
关键词(KeyWords)： 激光干涉仪;多自由度;运动误差;测量稳定性;在线测量;系统设计
基金项目(Foundation): 国家自然科学基金(21171179)~~
作者(Author): 杨博
DOI: 10.16652/j.issn.1004-373x.2018.08.006
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