申芳芳,艾淑平

• 1:吉林建筑大学基础科学部

摘要(Abstract)：

在氧化锌器件的应用中,高质量的金属/ZnO接触的制备是至关重要的问题。目前,在金属/ZnO接触的研究中,充当电极角色的多为不具有透明性的金属材料,使得氧化锌材料在光电子器件中的应用受到一定的限制。IrO2是一种既透明又导电的金属氧化物,具有较低的电阻率和较好的化学稳定性,其薄膜已被用作底电极和防热扩散层等。因此文中采用脉冲激光沉积方法(PLD)制备了IrO2/ZnO薄膜接触结构,用小角X射线衍射(XRD)对其进行表征,并测量该结构的电学特性。结果表明实验得到了生长良好的IrO2/ZnO薄膜接触结构,室温下为欧姆接触导电特性。

关键词(KeyWords)： IrO2;ZnO;薄膜接触结构;脉冲激光沉积;电学特性;X射线衍射

Abstract:

Keywords:

基金项目(Foundation): 吉林省教育厅“十二五”科学技术研究规划项目:IrO2/ZnO接触特性研究(2015第282号)~~

作者(Author): 申芳芳,艾淑平

DOI: 10.16652/j.issn.1004-373x.2018.24.008

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