MEMS陀螺器件与驱动电路的相位关系研究Research of phase relationship between MEMS gyroscope and driving circuit
陈华,郭桂良,阎跃鹏,来强涛,韩荆宇
摘要(Abstract)：
为了指导高性能MEMS陀螺的驱动电路设计,针对MEMS陀螺器件与外围驱动电路之间存在的"激励电压、静电力、质量块位移、检测电容变化、检测电流、检测电压"五次信号转换进行了详细研究,获得了确切的相位关系,建立传输函数模型。最终根据推得的总体相位关系,设计并实现了一款基于锁相技术的闭环驱动电路。测试结果表明,MEMS陀螺系统能在3s内可靠起振且无振铃,稳定振荡频率为10.33 kHz,稳定振荡幅度为2.05 V。该测试结果验证了此相位关系研究的必要性与正确性,此研究同样适用于其他静电驱动、电容检测式MEMS传感器。
关键词(KeyWords)： MEMS传感器;MEMS陀螺;驱动电路;接口电路;相位关系;锁相环
基金项目(Foundation): 国家自然科学基金资助项目(61234007)~~
作者(Author): 陈华,郭桂良,阎跃鹏,来强涛,韩荆宇
DOI: 10.16652/j.issn.1004-373x.2018.06.024
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