高动态电涡流位移传感器温度实时补偿算法Real-time temperature compensation algorithm for high-dynamic eddy current displacement sensor
李昌,周松斌,韩威
摘要(Abstract):
电涡流位移传感器在测量不同位移时有不同的温度灵敏度系数。单一的曲线拟合方法无法实现全量程的温度补偿。在温箱中收集多个指定位移处线圈电压的温飘数据,并拟合成曲线,根据这些曲线和传感器内线圈的温度可得到指定位移处线圈电压。用最小二乘法拟合指定位移和线圈电压得到一个多项式方程。把线圈电压值代入该方程可得到与温度无关的位移量,实现温度补偿。采用DMA中断和后台程序相结合的方法,使得传感器具有高动态响应。
关键词(KeyWords): 电涡流位移传感器;温度补偿;最小二乘法;在线拟合;高动态响应;DMA中断
基金项目(Foundation): 广东省科技项目(2016B090918061,2015B090901025,2014A010104010,2015A010103008)~~
作者(Author): 李昌,周松斌,韩威
DOI: 10.16652/j.issn.1004-373x.2018.05.030
参考文献(References):
- [1]朱军伟.基于模糊自适应PID算法的饮料灌装温度与液位控制[D].上海:东华大学,2010:7-8.ZHU Junwei.The control of fuzzy self-adaptive PID in temperature and level of beverages filling[D].Shanghai:Donghua University,2010:7-8.
- [2]李贵娥,麻红昭,沈家旗,等.电涡流检测技术及影响因素分析[J].传感技术学报,2009,22(11):1668-1669.LI Guie,MA Hongzhao,SHEN Jiaqi,et al.Analysis of detection principle and influential factors of eddy current[J].Chinese journal of sensors and actuators,2009,22(11):1668-1669.
- [3]王洪波.亚纳米精度电涡流传感器的理论和设计研究[D].合肥:中国科学技术大学,2015:23-24.WANG Hongbo.Design strategies of eddy current sensors with sub-nanometer accuracy[D].Hefei:University of Science and Technology of China,2015:23-24.
- [4]刘柱,李巍,金建新.电涡流传感器的特性分析与标定方法[J].机械与电子,2013(2):14-16.LIU Zhu,LI Wei,JIN Jianxin.Characteristics analysis and calibration of eddy current sensor[J].Machinery&electronics,2013(2):14-16.
- [5]于鹏,许媛媛.利用插值法和曲线拟合法标定电涡流传感器[J].中国测试技术,2007,33(1):139-141.YU Peng,XU Yuanyuan.Calibrating the electric eddy sensor by the interpolation method and curve fitting method[J].China measurement technology,2007,33(1):139-141.
- [6]吕云腾,祝长生.基于温漂补偿的高温电涡流位移传感器[J].浙江大学学报(工学版),2015,49(4):749-753.LüYunteng,ZHU Changsheng.High temperature eddy current displacement sensor based on temperature drift compensation[J].Journal of Zhejiang University(engineering science),2015,49(4):749-753.
- [7]王薇,曲昀卿,李娟,等.电涡流传感器的温度补偿[J].传感器与仪器仪表,2008,24(6):157-159.WANG Wei,QU Yunqing,LI Juan,et al.Temperature compensate of eddy current sensor[J].Instrument technique and sensors,2008,24(6):157-159.
- [8]王金辉,杨永平.管壳式发生器温度传感器测量的准确性校正[J].陕西理工学院学报(自然科学版),2015,31(2):21-22.WANG Jinhui,YANG Yongping.Correction on measuring accuracy of the shell-and-tube generator of temperature sensor[J].Journal of Shaanxi University of Technology(natural science edition),2015,31(2):21-22.
- [9]李移,曹现刚.电涡流位移传感器曲线拟合方程式的研究[J].煤矿机械,2013,34(1):94-96.LI Yi,CAO Xiangang.Curve fitting equation of eddy current displacement sensor research[J].Coal mine machinery,2013,34(1):94-96.
- [10]丛华,张德魁,赵鸿宾.电涡流传感器温度稳定性研究[J].清华大学学报(自然科学版),1999,39(10):65-68.CONG Hua,ZHANG Dekui,ZHAO Hongbin.Research on temperature stability of eddy current sensor[J].Journal of Tsinghua University(science and technology),1999,39(10):65-68.
- [11]肖茂森.PIC单片机芯片在电涡流传感器温度补偿中的应用[D].西安:西安建筑科技大学,2005:34-35.XIAO Maosen.Application of PIC single chip processor in temperature compensation of electric eddy transducer[D].Xi’an:Xi’an University of Architecture and Technology,2005:34-35.