刘滔,徐大诚,赵鹤鸣

• 1:苏州大学微纳传感技术研究中心

摘要(Abstract)：

温度对MEMS加速度计性能的影响至关重要。结合扭摆式硅微加速度计的结构及温度特性,采用基于自适应权重的粒子群优化算法来优化支持向量机算法,创建MEMS加速度计温度补偿模型,并利用STM32F405RG64实现实时温度补偿系统。实验结果表明,补偿后加速度计的标度因数温度系数、全温零偏极差、非线性度分别由补偿前的264 ppm/℃,71.98 mg,2.07%降低到105 ppm/℃,10.31 mg,0.25%,可见补偿后加速度计的性能得到比较明显的改进,能证明该方法的有效性和可行性。

关键词(KeyWords)： MEMS加速度计;扭摆式硅微加速度计;粒子群优化算法;自适应权重;支持向量机;温度补偿

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金重点项目(61434003);; 装备预研基金项目(9140A09032015)~~

作者(Author): 刘滔,徐大诚,赵鹤鸣

DOI: 10.16652/j.issn.1004-373x.2018.10.015

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